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1

[IEEE 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Gainesville, FL, USA (2010.09.28-2010.10.1)] 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Investigation of Ni-based silicide formation by different dynamic surface annealing approaches

Yonggen He,, Bing Wu,, Guobin Yu,, Jin Lin,, Zhang, Seanf, Jiong-Ping Lu,, Jingang Wu,, JiYue Tang,, Ganming Zhao,

Year:

2010

Language:

english

File:

PDF, 816 KB

english, 2010

2

ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Evolution of STI Gap Fill Technology

Chen, James C., Chen, Yingjie, Gao, Rong, Cheng, Charley, Li, Xianyuan, Zhao, Ganming, Chan, Diana, Lee, Terrance

Year:

2011

Language:

english

File:

PDF, 134 KB

english, 2011

3

SOI Structure pressure transducer formed by oxidized porous silicon

Zhao Ganming, Huang Yiping, Bao Minhang

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 523 KB

english, 1990

4

ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - STI Liner Evolution as the CMOS Scaling Down

Zhao, Zhibiao, Tang, Ji Yue, Fang, Zhijun, Zhao, Ganming

Year:

2010

Language:

english

File:

PDF, 474 KB

english, 2010

5

[IEEE 2014 14th International Workshop on Junction Technology (IWJT) - Shanghai, China (2014.5.18-2014.5.20)] 2014 International Workshop on Junction Technology (IWJT) - Investigation of Si Implantation into ILD (Interlayer Dielectric) for film property modification

He, Yonggen, Cai, Guohui, Zhou, Zuyuan, He, Youfeng, Zhao, Jie, Song, Weiji, Yu, Shaofeng, Wu, Jingang, Lu, Jun Feng, Zhao, Ganming

Year:

2014

Language:

english

File:

PDF, 370 KB

english, 2014

6

[IEEE 2012 12th International Workshop on Junction Technology (IWJT) - Shanghai (2012.05.14-2012.05.15)] 2012 12th International Workshop on Junction Technology - Process match between DSA and LSA for ultra-shallow junction formation

Yonggen He,, Bing Wu,, Guobin Yu,, Yong Chen,, Hailong Liu,, Wei Lu,, Jingang Wu,, Zhang, D. W., Chenyu Wang,, Ji Yue Tang,, Ganming Zhao,

Year:

2012

Language:

english

File:

PDF, 643 KB

english, 2012

7

Two-dimensional state of stress in a silicon wafer

Liang, Hancheng, Pan, Yongxiong, Zhao, Shounan, Qin, Ganming, Chin, K. Ken

Journal:

Journal of Applied Physics

Year:

1992

Language:

english

File:

PDF, 981 KB

english, 1992

8

[IEEE 4th International Conference on Solid-State and IC Technology - Beijing, China (24-28 Oct. 1995)] Proceedings of 4th International Conference on Solid-State and IC Technology - Film-induced stress in substrate/film structure

Hancheng Liang,, Shounan Zhao,, Ganming Qin,, Chin, K.K.

Year:

1995

Language:

english

File:

PDF, 176 KB

english, 1995

9

ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - Overlay Mitigation in RTO Process

Zhou, Qinggang, Tang, Ji Yue, Zhao, Ganming

Year:

2012

Language:

english

File:

PDF, 402 KB

english, 2012

10

ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Precise Control of Spike Anneal Process for Advanced CMOS

Zhao, Zhibiao, Tang, Ji Yue, Zhao, Ganming

Year:

2011

Language:

english

File:

PDF, 665 KB

english, 2011

11

ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - Two Steps Post Nitridation Anneal Study

Zhao, Zhibiao, Tang, Ji Yue, Zhao, Ganming

Year:

2012

Language:

english

File:

PDF, 224 KB

english, 2012

12

ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - 300mm Cu BEOL Top Trench Etch Process Development for 65nm Logic Technology

Ren, Wei, Song, Jeff, Liu, Andrew, Zhao, Ganming, Huang, Ying, Hsieh, Peter, Gu, Binxi, Wang, Judy

Year:

2010

Language:

english

File:

PDF, 326 KB

english, 2010

13

ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - High Doping HDP PSG Process Development

Cheng, Xinhua, Sun, Hongfu, Li, Xianyuan, Zhao, Ganming

Year:

2010

Language:

english

File:

PDF, 555 KB

english, 2010

14

ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - Extend Millisecond Anneal to Nickel Silicidation Process

Wang, Chenyu, Tang, Ji Yue, Zhao, Ganming

Year:

2012

Language:

english

File:

PDF, 457 KB

english, 2012

15

[IEEE 2016 16th International Workshop on Junction Technology (IWJT) - Shanghai, China (2016.5.9-2016.5.10)] 2016 16th International Workshop on Junction Technology (IWJT) - Device performance improvement with implantation balancing energy contamination and productivity

He, Yonggen, Cai, Guohui, Zhou, Zuyuan, He, Youfeng, Wu, Jingang, Zhang, David Wei, Cai, Ting, Lu, Junfeng, Zhao, Ganming, Guo, Baonian

Year:

2016

Language:

english

File:

PDF, 3.48 MB

english, 2016

16

Large spatial Goos-HÃ¤nchen shifts from quasicrystals with graphene

Xu, Bin, Zhao, Xiuju, Li, Ganming, Zhang, Pu, Zhao, Dong, Kong, Xiangna, Hua, Rui

Journal:

Results in Physics

Year:

2020

File:

PDF, 8.63 MB

2020